Currently, driven by the rapid development of the Internet of Things, smart manufacturing, and high-end equipment, industrial-grade MEMS inertial chips, inertial modules, and high-precision pressure sensors are entering a critical window for large-scale deployment. As the “nerve endings” of intelligent sensing systems, these core components play an irreplaceable role in applications such as industrial automation, unmanned systems, and aerospace. In particular, at the chip design stage, domestic technical teams have continuously optimized MEMS process architectures, breaking through key technical bottlenecks such as low noise and wide dynamic range, thereby bringing device performance metrics up to internationally advanced levels. In the packaging and testing phase, the adoption of hermetic packaging and low-temperature co-fired ceramic (LTCC) technology has effectively enhanced environmental robustness and long-term stability. At the system integration level, the development of multi-sensor fusion algorithms has enabled synergistic optimization of inertial navigation and pressure measurement, providing a comprehensive solution for precise sensing under complex operating conditions. Leveraging more than a decade of sustained R&D investment, domestic companies have established a dual-engine development model centered on “chips plus algorithms.” On the chip front, an independently developed MEMS design platform enables vertical integration across the entire value chain—from device architecture simulation to process fabrication—significantly shortening the R&D cycle. On the algorithm side, leveraging advanced technologies such as Kalman filtering and machine learning, adaptive compensation models have been constructed to effectively mitigate the adverse effects of non-ideal factors like temperature drift and vibration interference. This integrated hardware–software innovation approach not only ensures that products maintain attitude measurement accuracy within ±0.01° over an extreme temperature range of −40°C to 85°C, but also improves the long-term stability of pressure sensors to 0.01% of full scale per year, thereby providing reliable assurance for long-duration applications such as underground pipeline monitoring and marine equipment navigation. To date, these technological achievements have been deployed at scale in sectors including rail transit, energy extraction, and intelligent driving. For instance, in rail transit, train positioning systems incorporating domestically produced high-precision inertial modules can still maintain meter-level positioning accuracy even in environments where GPS signals are obstructed, such as tunnels. In oil and gas exploration, downhole measurement systems equipped with proprietary pressure sensors have boosted drilling efficiency by more than 30%. These breakthroughs signify that China has transitioned from technology catch-up to parallel advancement—and in some areas, even leadership—in the field of intelligent sensing, laying a solid foundation for building an independent and controllable industrial Internet ecosystem.